@article {Tormen201521,
	title = {Sub-100 μs nanoimprint lithography at wafer scale},
	journal = {Microelectronic Engineering},
	volume = {141},
	year = {2015},
	note = {cited By 0},
	pages = {21-26},
	doi = {10.1016/j.mee.2015.01.002},
	url = {http://www.scopus.com/inward/record.url?eid=2-s2.0-84921462639&partnerID=40&md5=d7d8efdf0d47a37dedf5356fc82ffa92},
	author = {Tormen, M. and Sovernigo, E. and Pozzato, A. and Pianigiani, M. and Tormen, M.}
}
