@conference {Pret2016,
	title = {Characterizing and modeling electrical response to light for metal-based EUV photoresists},
	booktitle = {Proceedings of SPIE - The International Society for Optical Engineering},
	volume = {9779},
	year = {2016},
	note = {cited By 0},
	doi = {10.1117/12.2219736},
	url = {https://www.scopus.com/inward/record.uri?eid=2-s2.0-84974528617&partnerID=40&md5=2c9a404d87c6b13b21fa42f4eccf9edf},
	author = {Pret, A.V. and Kocsis, M. and De Simone, D. and Vandenberghe, G. and Stowers, J. and Giglia, A. and De Schepper, P. and Mani, A. and Biafore, J.J.}
}
