@article {Giorgis2014,
	title = {Fabrication of multiple large arrays of split ring resonators by X-ray lithographic process for sensing purposes},
	journal = {Microelectronic Engineering},
	volume = {127},
	year = {2014},
	month = {sep},
	pages = {68–71},
	doi = {10.1016/j.mee.2014.04.030},
	author = {Giorgis, V. and Zilio, P. and Massari, M. and Ruffato, G. and Zacco, G. and Romanato, F.}
}
