@article {Grenci2014,
	title = {Microfabrication of sharp blazed gratings by a two-step height amplification process based on soft and deep X-ray lithography},
	journal = {Sensors and Actuators A-physical},
	volume = {205},
	year = {2014},
	month = {jan},
	pages = {111–118},
	doi = {10.1016/j.sna.2013.09.036},
	author = {Grenci, Gianluca and Sovernigo, Enrico and Khokhar, Ali Z. and Gadegaard, Nikolaj and Prasciolu, Mauro and Tormen, Massimo}
}
