@article {Toffoli2013b,
	title = {Actuation of silicon pillar micro-mechanical resonators by Kelvin polarization force},
	journal = {Microelectronic Engineering},
	volume = {111},
	year = {2013},
	month = {nov},
	pages = {1–6},
	doi = {10.1016/j.mee.2013.05.013},
	author = {Toffoli, Valeria and Dandash, Fadlallah and Pozzato, Alessandro and Borin, Daniele and Carrato, Sergio and Lazzarino, Marco}
}
