@article {Zanchetta2013,
	title = {Novel Hybrid Organic-Inorganic Spin-on Resist for Electron- or Photon-Based Nanolithography with Outstanding Resistance to Dry Etching},
	journal = {Advanced Materials},
	volume = {25},
	number = {43},
	year = {2013},
	month = {nov},
	pages = {6261–6265},
	doi = {10.1002/adma.201301555},
	author = {Zanchetta, Erika and Della Giustina, Gioia and Grenci, Gianluca and Pozzato, Alessandro and Tormen, Massimo and Brusatin, Giovanna}
}
