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A. V.  Pret, Kocsis, M., De Simone, D., Vandenberghe, G., Stowers, J., Giglia, A., De Schepper, P., Mani, A., and Biafore, J. J., ?Characterizing and modeling electrical response to light for metal-based EUV photoresists?, in Proceedings of SPIE - The International Society for Optical Engineering, 2016, vol. 9779.\par \par }