G.  Grenci, Sovernigo, E., Khokhar, A. Z., Gadegaard, N., Prasciolu, M., and Tormen, M., ?Microfabrication of sharp blazed gratings by a two-step height amplification process based on soft and deep X-ray lithography?, Sensors and Actuators A-physical, vol. 205, pp. 111?118, 2014.