F.  Siewert, Buchheim, J., Hoeft, T., Zeschke, T., Schindler, A., and Arnold, T., ?Investigations on the spatial resolution of autocollimator-based slope measuring profilers?, Nuclear Instruments & Methods In Physics Research Section A-accelerators Spectrometers Detectors and Associated Equipment, vol. 710, pp. 42?47, 2013.