XAS photoresists electron/quantum yields study with synchrotron light
| Title | XAS photoresists electron/quantum yields study with synchrotron light |
| Publication Type | Conference Paper |
| Year of Publication | 2015 |
| Authors | De Schepper, P, A. Pret, V, Hansen, T, Giglia, A, Hoshiko, K, Mani, A, Biafore, JJ |
| Conference Name | Proceedings of SPIE - The International Society for Optical Engineering |
| URL | http://www.scopus.com/inward/record.url?eid=2-s2.0-84931401564&partnerID=40&md5=5e6ffbf81630a0211c65701162cb2182 |
| DOI | 10.1117/12.2085951 |
