Controlling the grain size of polycrystalline TiO2 films grown by atomic layer deposition

TitleControlling the grain size of polycrystalline TiO2 films grown by atomic layer deposition
Publication TypeJournal Article
Year of Publication2017
AuthorsI. Piltaver, K, Peter, R, Šarić, I, Salamon, K, I. Badovinac, J, Koshmak, K, Nannarone, S, I. Marion, D, Petravić, M
JournalApplied Surface Science
Volume419
Pagination564-572
URLhttps://www.scopus.com/inward/record.uri?eid=2-s2.0-85019906143&doi=10.1016%2fj.apsusc.2017.04.146&partnerID=40&md5=8f873059e15027eb88f95e3b95b49c1a
DOI10.1016/j.apsusc.2017.04.146