Controlling the grain size of polycrystalline TiO2 films grown by atomic layer deposition
Title | Controlling the grain size of polycrystalline TiO2 films grown by atomic layer deposition |
Publication Type | Journal Article |
Year of Publication | 2017 |
Authors | I. Piltaver, K, Peter, R, Šarić, I, Salamon, K, I. Badovinac, J, Koshmak, K, Nannarone, S, I. Marion, D, Petravić, M |
Journal | Applied Surface Science |
Volume | 419 |
Pagination | 564-572 |
URL | https://www.scopus.com/inward/record.uri?eid=2-s2.0-85019906143&doi=10.1016%2fj.apsusc.2017.04.146&partnerID=40&md5=8f873059e15027eb88f95e3b95b49c1a |
DOI | 10.1016/j.apsusc.2017.04.146 |