Deposition and characterization of B4C/CeO2 multilayers at 6.x nm extreme ultraviolet wavelengths
| Title | Deposition and characterization of B4C/CeO2 multilayers at 6.x nm extreme ultraviolet wavelengths |
| Publication Type | Journal Article |
| Year of Publication | 2016 |
| Authors | Sertsu, MG, Giglia, A, Brose, S, Park, D, Wang, ZS, Mayer, J, Juschkin, L, Nicolosi, P |
| Journal | Journal of Applied Physics |
| Volume | 119 |
| URL | https://www.scopus.com/inward/record.uri?eid=2-s2.0-84959465971&partnerID=40&md5=99217890874dface64fd1aa065ad6b2b |
| DOI | 10.1063/1.4942656 |
