Electrically-assisted nanoimprint of block copolymers
| Title | Electrically-assisted nanoimprint of block copolymers |
| Publication Type | Journal Article |
| Year of Publication | 2019 |
| Authors | Mayer, A, Ai, W, Rond, J, Staabs, J, Steinberg, C, Papenheim, M, Scheer, H-C, Tormen, M, Cian, A, Zajadacz, J, Zimmer, K |
| Journal | Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics |
| Volume | 37 |
| URL | https://www.scopus.com/inward/record.uri?eid=2-s2.0-85058503119&doi=10.1116%2f1.5048204&partnerID=40&md5=52b6c712ec076c06b885e309c20a7fec |
| DOI | 10.1116/1.5048204 |
