High charge density silica micro-electrets fabricated by electron beam

TitleHigh charge density silica micro-electrets fabricated by electron beam
Publication TypeJournal Article
Year of Publication2018
AuthorsBonacci, F, Di Michele, A, Caponi, S, Cottone, F, Mattarelli, M
JournalSmart Materials and Structures
Volume27
URLhttps://www.scopus.com/inward/record.uri?eid=2-s2.0-85049694380&doi=10.1088%2f1361-665X%2faaca55&partnerID=40&md5=e88927bb5bfa2a46251c415fda819ce4
DOI10.1088/1361-665X/aaca55