High charge density silica micro-electrets fabricated by electron beam
Title | High charge density silica micro-electrets fabricated by electron beam |
Publication Type | Journal Article |
Year of Publication | 2018 |
Authors | Bonacci, F, Di Michele, A, Caponi, S, Cottone, F, Mattarelli, M |
Journal | Smart Materials and Structures |
Volume | 27 |
URL | https://www.scopus.com/inward/record.uri?eid=2-s2.0-85049694380&doi=10.1088%2f1361-665X%2faaca55&partnerID=40&md5=e88927bb5bfa2a46251c415fda819ce4 |
DOI | 10.1088/1361-665X/aaca55 |