Irradiation of low energy ions damage analysis on multilayers
| Title | Irradiation of low energy ions damage analysis on multilayers |
| Publication Type | Conference Paper |
| Year of Publication | 2015 |
| Authors | Sertsu, MG, Giglia, A, Juschkin, L, Nicolosi, P |
| Conference Name | Proceedings of SPIE - The International Society for Optical Engineering |
| URL | http://www.scopus.com/inward/record.url?eid=2-s2.0-84943399229&partnerID=40&md5=c06cd7415642a94c92f7de585b8a7746 |
| DOI | 10.1117/12.2181821 |
