Effect of nanoimprint on the elastic modulus of PMMA: Comparison between standard and ultrafast thermal NIL
| Title | Effect of nanoimprint on the elastic modulus of PMMA: Comparison between standard and ultrafast thermal NIL |
| Publication Type | Journal Article |
| Year of Publication | 2016 |
| Authors | Pianigiani, M, Kirchner, R, Sovernigo, E, Pozzato, A, Tormen, M, Schift, H |
| Journal | Microelectronic Engineering |
| Volume | 155 |
| Pagination | 85-91 |
| URL | https://www.scopus.com/inward/record.uri?eid=2-s2.0-84960849485&partnerID=40&md5=c82ab842ee5af210ff864651d51aed5c |
| DOI | 10.1016/j.mee.2016.03.019 |
