Effects of Titanium Layer Oxygen Scavenging on the High-k/InGaAs Interface
| Title | Effects of Titanium Layer Oxygen Scavenging on the High-k/InGaAs Interface |
| Publication Type | Journal Article |
| Year of Publication | 2016 |
| Authors | Winter, R, Shekhter, P, Tang, K, Floreano, L, Verdini, A, McIntyre, PC, Eizenberg, M |
| Journal | ACS Applied Materials and Interfaces |
| Volume | 8 |
| Pagination | 16979-16984 |
| URL | https://www.scopus.com/inward/record.uri?eid=2-s2.0-84977663153&partnerID=40&md5=4a364a21d97bc99c446bb83d4636bf28 |
| DOI | 10.1021/acsami.6b02957 |
