Perfluoropolyether (PFPE) intermediate molds for high-resolution thermal nanoimprint lithography
Title | Perfluoropolyether (PFPE) intermediate molds for high-resolution thermal nanoimprint lithography |
Publication Type | Journal Article |
Year of Publication | 2018 |
Authors | Masciullo, C, Sonato, A, Romanato, F, Cecchini, M |
Journal | Nanomaterials |
Volume | 8 |
URL | https://www.scopus.com/inward/record.uri?eid=2-s2.0-85051851360&doi=10.3390%2fnano8080609&partnerID=40&md5=1524a538c026ea1ada4e1f0a86a3be87 |
DOI | 10.3390/nano8080609 |