Optical and dielectric force gradient actuation schemes for excitation of triple coupled micro cantilever sensor in mass sensing applications

TitleOptical and dielectric force gradient actuation schemes for excitation of triple coupled micro cantilever sensor in mass sensing applications
Publication TypeJournal Article
Year of Publication2015
AuthorsSiddaiah, N, Reddy, DVRama Koti, Prasad, GRK, Pakdast, H, Babu, PSS
JournalARPN Journal of Engineering and Applied Sciences
Volume10
Pagination3275-3279
URLhttp://www.scopus.com/inward/record.url?eid=2-s2.0-84929377062&partnerID=40&md5=687690e72e0ad3af2d83989b940520b5