Optical and dielectric force gradient actuation schemes for excitation of triple coupled micro cantilever sensor in mass sensing applications
Title | Optical and dielectric force gradient actuation schemes for excitation of triple coupled micro cantilever sensor in mass sensing applications |
Publication Type | Journal Article |
Year of Publication | 2015 |
Authors | Siddaiah, N, Reddy, DVRama Koti, Prasad, GRK, Pakdast, H, Babu, PSS |
Journal | ARPN Journal of Engineering and Applied Sciences |
Volume | 10 |
Pagination | 3275-3279 |
URL | http://www.scopus.com/inward/record.url?eid=2-s2.0-84929377062&partnerID=40&md5=687690e72e0ad3af2d83989b940520b5 |