Towards chemically neutral carbon cleaning processes: plasma cleaning of Ni, Rh and Al reflective optical coatings and thin Al filters for free-electron lasers and synchrotron beamline applications

TitleTowards chemically neutral carbon cleaning processes: plasma cleaning of Ni, Rh and Al reflective optical coatings and thin Al filters for free-electron lasers and synchrotron beamline applications
Publication TypeJournal Article
Year of Publication2018
AuthorsH. Fernández, M, Zangrando, M, Sauthier, G, Goñi, AR, Carlino, V, Pellegrin, E
JournalJournal of Synchrotron Radiation
Volume25
Pagination1642-1649
URLhttps://www.scopus.com/inward/record.uri?eid=2-s2.0-85055731477&doi=10.1107%2fS1600577518014017&partnerID=40&md5=d02b370c7cfc008d40b4b4f6ab913317
DOI10.1107/S1600577518014017