Actuation of silicon pillar micro-mechanical resonators by Kelvin polarization force
| Title | Actuation of silicon pillar micro-mechanical resonators by Kelvin polarization force |
| Publication Type | Journal Article |
| Year of Publication | 2013 |
| Authors | Toffoli, V, Dandash, F, Pozzato, A, Borin, D, Carrato, S, Lazzarino, M |
| Journal | Microelectronic Engineering |
| Volume | 111 |
| Pagination | 1–6 |
| Date Published | nov |
| DOI | 10.1016/j.mee.2013.05.013 |
