Fabrication of multiple large arrays of split ring resonators by X-ray lithographic process for sensing purposes
| Title | Fabrication of multiple large arrays of split ring resonators by X-ray lithographic process for sensing purposes |
| Publication Type | Journal Article |
| Year of Publication | 2014 |
| Authors | Giorgis, V, Zilio, P, Massari, M, Ruffato, G, Zacco, G, Romanato, F |
| Journal | Microelectronic Engineering |
| Volume | 127 |
| Pagination | 68–71 |
| Date Published | sep |
| DOI | 10.1016/j.mee.2014.04.030 |
