Investigations on the spatial resolution of autocollimator-based slope measuring profilers
| Title | Investigations on the spatial resolution of autocollimator-based slope measuring profilers |
| Publication Type | Journal Article |
| Year of Publication | 2013 |
| Authors | Siewert, F, Buchheim, J, Hoeft, T, Zeschke, T, Schindler, A, Arnold, T |
| Journal | Nuclear Instruments & Methods In Physics Research Section A-accelerators Spectrometers Detectors and Associated Equipment |
| Volume | 710 |
| Pagination | 42–47 |
| Date Published | may |
| DOI | 10.1016/j.nima.2012.10.130 |
