Novel Hybrid Organic-Inorganic Spin-on Resist for Electron- or Photon-Based Nanolithography with Outstanding Resistance to Dry Etching
| Title | Novel Hybrid Organic-Inorganic Spin-on Resist for Electron- or Photon-Based Nanolithography with Outstanding Resistance to Dry Etching |
| Publication Type | Journal Article |
| Year of Publication | 2013 |
| Authors | Zanchetta, E, Giustina, GDella, Grenci, G, Pozzato, A, Tormen, M, Brusatin, G |
| Journal | Advanced Materials |
| Volume | 25 |
| Pagination | 6261–6265 |
| Date Published | nov |
| DOI | 10.1002/adma.201301555 |
