Sub-100 μs nanoimprint lithography at wafer scale
| Title | Sub-100 μs nanoimprint lithography at wafer scale |
| Publication Type | Journal Article |
| Year of Publication | 2015 |
| Authors | Tormen, M, Sovernigo, E, Pozzato, A, Pianigiani, M, Tormen, M |
| Journal | Microelectronic Engineering |
| Volume | 141 |
| Pagination | 21-26 |
| URL | http://www.scopus.com/inward/record.url?eid=2-s2.0-84921462639&partnerID=40&md5=d7d8efdf0d47a37dedf5356fc82ffa92 |
| DOI | 10.1016/j.mee.2015.01.002 |
