Characterizing and modeling electrical response to light for metal-based EUV photoresists
| Title | Characterizing and modeling electrical response to light for metal-based EUV photoresists |
| Publication Type | Conference Paper |
| Year of Publication | 2016 |
| Authors | Pret, AV, Kocsis, M, De Simone, D, Vandenberghe, G, Stowers, J, Giglia, A, De Schepper, P, Mani, A, Biafore, JJ |
| Conference Name | Proceedings of SPIE - The International Society for Optical Engineering |
| URL | https://www.scopus.com/inward/record.uri?eid=2-s2.0-84974528617&partnerID=40&md5=2c9a404d87c6b13b21fa42f4eccf9edf |
| DOI | 10.1117/12.2219736 |
