Characterization of TiO2 thin films in the EUV and soft X-ray region
| Title | Characterization of TiO2 thin films in the EUV and soft X-ray region |
| Publication Type | Conference Paper |
| Year of Publication | 2015 |
| Authors | Comisso, A, Giglia, A, Nardello, M, Tessarolo, E, Calvillo, L, Sertsu, MG, Granozzi, G, Gerlin, F, Brigo, L, Nicolosi, P |
| Conference Name | Proceedings of SPIE - The International Society for Optical Engineering |
| URL | http://www.scopus.com/inward/record.url?eid=2-s2.0-84949024021&partnerID=40&md5=f5b48ae10935b8866e0231eb74391559 |
| DOI | 10.1117/12.2178142 |
