Microfabrication of sharp blazed gratings by a two-step height amplification process based on soft and deep X-ray lithography
| Title | Microfabrication of sharp blazed gratings by a two-step height amplification process based on soft and deep X-ray lithography |
| Publication Type | Journal Article |
| Year of Publication | 2014 |
| Authors | Grenci, G, Sovernigo, E, Khokhar, AZ, Gadegaard, N, Prasciolu, M, Tormen, M |
| Journal | Sensors and Actuators A-physical |
| Volume | 205 |
| Pagination | 111–118 |
| Date Published | jan |
| DOI | 10.1016/j.sna.2013.09.036 |
